| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem in which localization is caused in a resistance for a blade, with the blade obliquely bent in machining, if a deviation is increased between the center of the blade and the center of a gap in machining a gap between piezoelectric element members, when a plurality of piezoelectric element posts are formed by performing grooving, with the plurality of piezoelectric element members arranged arrayed with spaces apart. SOLUTION: In an piezoelectric actuator 1, piezoelectric element members PzT1-PZT3 are joined/arranged by being placed in parallel with spaces 3 apart on a common base member 4, with the center of the gaps and the center of the grooving blade aligned to form grooves 5. On the basis of a distance between the centers of each groove 5 and a required number of the piezoelectric element posts 11, the grooves 5 for the piezoelectric element members PZT are machined, with the required number of piezoelectric element posts 11 formed. In the piezoelectric element members PZT1, PZT2, PZT3, the piezoelectric element posts 11 are formed each with a different pitch P1, P2, P3. COPYRIGHT: (C)2009,JPO&INPIT
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