| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for an inkjet recording head which has a structure that prevents different kinds of metals from touching ink, moisture, etc. although it has a power wiring line of a low resistance formed of the plating method, and to provide its manufacturing method. SOLUTION: A common wiring line for supplying an electric power to an individual wiring line 102 consists of a diffusion preventing layer 104 formed to a partial region centering a via hole 232, a first metal 105 which coats its top surface and side surface, and further a second metal 106 layered on the first metal. At this time, a surface of the common wiring line is formed of a single metal by the same element. COPYRIGHT: (C)2009,JPO&INPIT
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