| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flexible, accurate and contaminant free real-time continuous blending system and to provide accurate pressure control to ensure proper blending and accurate fluid flow rates to the processing tool. <P>SOLUTION: A fluid delivery system includes a flow control device and a Coriolis mass flowmeter 112 in fluid communication with the flow control device 110. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller 114 provides a control output signal to the flow control device 110, which may comprise a pinch valve 120, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter 112. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
