发明名称 |
METHOD OF HYDRATING A CERAMIC SPRAY-COATING LAYER, METHOD OF MANUFACTURING AN ELECTROSTATIC CHUCK THAT USES THE HYDRATING METHOD, AND SUBSTRATE STRUCTURE AND ELECTROSTATIC CHUCK HAVING THE CERAMIC SPRAY-COATING LAYER FORMED USING THE HYDRATING METHOD |
摘要 |
<p>In a method of hydrating a ceramic spray-coating layer of an electrostatic chuck, water penetrates into pores and/or cracks of the ceramic spray-coating layer, and the penetrated water then reacts with the ceramic spray-coating layer to form hydroxide in the pores and/or cracks. As a result, the electrical characteristics and hydrophobicity of the ceramic spray-coating layer may be improved.</p> |
申请公布号 |
WO2009008598(A2) |
申请公布日期 |
2009.01.15 |
申请号 |
WO2008KR03386 |
申请日期 |
2008.06.16 |
申请人 |
KOMICO LTD.;JANG, KYUNG-IC;YE, KYUNG-HWAN;KIM, SAM-WOONG;YUK, HYUN-MI |
发明人 |
JANG, KYUNG-IC;YE, KYUNG-HWAN;KIM, SAM-WOONG;YUK, HYUN-MI |
分类号 |
B05D5/12 |
主分类号 |
B05D5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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