ROBOT ARM ALIGN APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT WITH THE SAME

摘要

The semiconductor manufacturing facilities equipped with a plurality of robot arms is provided to perform the exact align of the robot arm. The robot arm aligning apparatus(100) comprises the align fixture(120). The align fixture comprises a plurality of slots(122 :122a,122b) corresponds to a plurality of robot arms to align the robot arms of the wafer transfer device(110). The wafer transfer device has a plurality of robot arms. The robot arm aligning apparatus comprises the support stand(130) for the align fixture. The support stand is comprised of the upper side of the carrier for mounting a plurality of wafers.