发明名称 |
GREIFER UND BETRIEBSVERFAHREN |
摘要 |
<p>The invention relates to a gripper for handling frames ( 2 ) that are covered with a film ( 3 ) that is intended for the transport of wafers ( 6 ). The gripper comprises at least two flat fingers ( 10 ) that carry flattened finger tips ( 8 ). This construction allows to insert the gripper between two frames ( 2 ) that are mounted in a cassette ( 9 ) without complication. The fingers ( 10 ) support in subsections both the frame ( 2 ) and the film ( 3 ). The film is attached to the frame due to the suction effect exerted by vacuum openings ( 5 ) configured on the frame, thereby fixating the film on the gripper.</p> |
申请公布号 |
AT419646(T) |
申请公布日期 |
2009.01.15 |
申请号 |
AT20030788848T |
申请日期 |
2003.12.04 |
申请人 |
ICOS VISION SYSTEMS N.V. |
发明人 |
GERHARD, DETLEF;LECHNER, JOHANNES;RENNER, MARTIN |
分类号 |
H01L21/68;B65G;B65G47/91;H01L21/673;H01L21/677 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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