| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique of enabling flushing of a head in a relatively short time in a fluid jet apparatus. SOLUTION: The fluid jet apparatus is equipped with the head which ejects a fluid in the form of droplets towards a predetermined processing surface position, an ejection adjusting part for adjusting at least one of a weight per droplet of the fluid ejected from the head and an emission speed, and a fluid collecting part which collects the fluid ejected from the head. When carrying out flushing of the head in the fluid jet apparatus, (i) the head is arranged above the predetermined processing surface position, (ii) the ejection adjusting part adjusts at least one of a weight per ejection of the fluid and the emission speed so that the fluid ejected from the head comes to drift in a gap between the head and the predetermined processing surface position, and (iii) the fluid collecting part collects the fluid which drifts in the gap. COPYRIGHT: (C)2009,JPO&INPIT |
