| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of effectively detecting a reflected electron generated from a sample at a low angle while realizing a short focus distance and forming a sample image. SOLUTION: A secondary electron conversion electrode 7 for generating a secondary electron 9a caused by collision of the reflected electron 8a is arranged further toward an electron source side than an object lens 4 and toward a sample side than a secondary electron detector 5a. Thus, the reflected electron generated from the sample at a low angle can be effectively detected on the basis of the formation. COPYRIGHT: (C)2009,JPO&INPIT
|
