发明名称 MAGNETIC SENSOR AND PRODUCTION METHOD THEREOF
摘要 A magnetic sensor is disclosed that has plural axes at the same time, able to be fabricated in a small number of steps. The magnetic sensor includes a substrate; and plural sensor bridge circuits each including a pair of magnetic field detectors and a pair of fixed resistors on the substrate, the pair of the magnetic field detectors and the pair of the fixed resistors being connected to form a bridge circuit, each of the magnetic field detectors being formed of a magneto-resistance effect element, and magnetization directions of the magnetic field detectors intersect with each other in a three-dimensional manner. The substrate has plural inclined surfaces, normal directions of the inclined surfaces intersect with each other in a three-dimensional manner, and the pair of the magnetic field detectors in each of the sensor bridge circuits is arranged on the same inclined surface.
申请公布号 US2009015251(A1) 申请公布日期 2009.01.15
申请号 US20080137902 申请日期 2008.06.12
申请人 AZUMI JUNICHI;KOU FUTOYOSHI;FUSE AKIHIRO 发明人 AZUMI JUNICHI;KOU FUTOYOSHI;FUSE AKIHIRO
分类号 G01R33/09;G01R3/00 主分类号 G01R33/09
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