摘要 |
PROBLEM TO BE SOLVED: To provide an oxide conductive material in which the reduction of a use amount of indium is possible and which has superior conductivity, and its manufacturing method. SOLUTION: This is the manufacturing method of the oxide conductive material adjusts a suspension containing a compound composed of an indium compound and two or more elements selected from a group composed of Sn, Zn, Mg, Ni, Al, Ga, Si, and Ge, obtains a vaporized mixture by supplying the suspension into thermal plasma, and cools the mixture. COPYRIGHT: (C)2009,JPO&INPIT
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