| 摘要 |
PROBLEM TO BE SOLVED: To realize a film-forming mask capable of forming a pattern thin film of an organic EL element in a pixel uniformly and in high definition. SOLUTION: For a deposition mask equipped with an opening 1 for mask film forming on a deposition substrate, metal films 2 are formed on the surface of a mask member 3 on an opposite side of the deposition substrate and a side face 1a of the opening 1. With this, a diameter of the opening 1 is contracted by a thickness H2 of the metal film 2 to enable higher definition of the pattern thin film. Moreover, by forming the metal film 2 only on the surface opposite to the deposition substrate side of the mask member 3, mask strength can be improved while an increase of mask thickness is suppressed to heighten durability. COPYRIGHT: (C)2009,JPO&INPIT
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