SLOPING ELECTRODES IN A SPATIAL LIGHT MODULATOR

摘要

A method of tilting a micromirror (218) includes forming a substrate (202), a micromirror outwardly from the substrate, and at least one electrode (212a) inwardly from the micromirror. The method further includes applying, by the at least one electrode, electrostatic forces sufficient to pivot the micromirror about a pivot point. In addition, the method includes providing the at least one electrode with a sloped outer surface (210a). The sloped outer surface has a first end and a second end. The second end is closer to the pivot point than the first end, and the first end is closer to the substrate than the second end. The method also includes providing at least a portion of the at least one electrode with material properties that at least partially contribute to the sloped profile of the sloped outer surface.