发明名称 NON-VOLATILE MEMORY DEVICE AND FABRICATION METHOD THEREOF
摘要 In one embodiment, a non-volatile memory device includes an isolation film defining an active region in a semiconductor substrate; a tunnel insulating film located on the active region; a control gate located on the isolation film; an inter-gate dielectric film parallel to the control gate and located between the control gate and the isolation film; an electrode overlapped by the control gate and the inter-gate dielectric film, wherein the electrode extends over the tunnel insulating film on the active region to form a floating gate; and a source region and a drain region formed in the active region on both sides of the floating gate.
申请公布号 US2009014766(A1) 申请公布日期 2009.01.15
申请号 US20080136580 申请日期 2008.06.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM MYOUNG-SOO
分类号 H01L29/94 主分类号 H01L29/94
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