| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor and its manufacturing method preventing a weight part from sticking to a glass substrate when performing anode-joining of a transducer structure made of a semiconductor to the glass substrate. <P>SOLUTION: This angular velocity sensor is provided with: a first structure including a fixation part having an opening, a displacement part disposed in the opening and displaced relative to the fixation part, and a connection part connecting the fixation part to the displacement part; a second structure including the weight part joined to the displacement part and a seat joined to the fixation part, and disposed in layers on the first structure; and a substrate including an electrode for drive and an electrode for detection disposed on an opposite surface to the weight part, and disposed in layers on the second structure while being connected to the seat. The second structure includes a projecting part disposed on a surface of the weight part confronting the substrate and in a domain corresponding to a domain with the electrodes not disposed therein, and having a thickness larger than those of the electrodes. <P>COPYRIGHT: (C)2009,JPO&INPIT |
