| 摘要 |
PROBLEM TO BE SOLVED: To provide a dynamic sensor of high sensitivity that has no concern of sensitivity reduction or destruction even in an application where it is brought into contact with a sensor element and is deformed. SOLUTION: In a dynamic sensor for detecting an external force from variation of impedance by distortion using magnetic thin films 12a and 12b, the applying direction of the external force shown by the arrow R is set to the longitudinal direction of a nonmagnetic material substrate 11 and magnetic thin films 12a and 12b. By adding signals from the magnetic thin films 12a and 12b on a pair of opposite surfaces, the offset of a signal by bending is canceled. Using a guide member 14 for preventing the bending also as a magnetic shield allows achievement of the high-sensitivity dynamic sensor that hardly receives disturbance of an external magnetic field. COPYRIGHT: (C)2009,JPO&INPIT
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