| 摘要 |
PROBLEM TO BE SOLVED: To provide a quality determination device for a semiconductor device capable of determining the quality of the semiconductor device quickly and accurately. SOLUTION: This quality determination device for the semiconductor device has a holding means for holding the semiconductor device detachably; a power supply means for supplying the power to the semiconductor device; an imaging means for floodlighting onto the main surface of the semiconductor device, and simultaneously imaging it; and a shielding means arranged between the holding means and the imaging means, for shielding a part of an imaging domain by the imaging means. COPYRIGHT: (C)2009,JPO&INPIT
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