发明名称 |
MULTILAYER BARRIER STACKS AND METHODS OF MAKING MULTILAYER BARRIER STACKS |
摘要 |
An improved barrier stack. The barrier stack is made by the process of depositing the polymeric decoupling layer on a substrate; depositing a first inorganic layer on the decoupling layer under a first set of conditions wherein an ion and neutral energy arriving at the substrate is less than about 20 eV so that the first inorganic layer is not a barrier layer, wherein a temperature of the substrate is less than about 15O°C; and depositing a second inorganic layer on the first inorganic layer under a second set of conditions wherein an ion and neutral energy arriving at the substrate is greater than about 50 eV so that the second inorganic layer is a barrier layer. Methods of reducing damage to a polymeric layer in a barrier stack are also described. |
申请公布号 |
WO2009009306(A2) |
申请公布日期 |
2009.01.15 |
申请号 |
WO2008US68337 |
申请日期 |
2008.06.26 |
申请人 |
VITEX SYSTEMS, INC.;MORO, LORENZA;CHU, XI |
发明人 |
MORO, LORENZA;CHU, XI |
分类号 |
C23C14/06;B05D7/26;C23C16/30;H01L51/54 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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