| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film capacitor of high reliability capable of suppressing increase in leakage current, by preventing slipping-out of oxygen from a thin dielectric layer, even when heat treatment is carried out. SOLUTION: The dielectric thin-film capacitor is made to have a constitution that a capacitor portion equipped with a lower electrode 3, a thin-film dielectric layer 4, and an upper elctrode 5 is covered with an insulated protective layer 11; and further, a first contact hole 13 which uses the lower electrode as a bottom face and a second contact hole 14 useing the upper electrode as the bottom face are provided; first and second lead-out conductors 15, 16 connecting to the lower electrode and the upper electrode are formed in the interior of the first and the second contact hole; and the first and/or the second lead-out conductors is equipped with a conductive oxide layer. The dielectric thin-film capacitor is constituted so as to have the first and/or the second conductive lead-out conductor equipped with the conductive oxide layer and a metal layer, and the conductive oxide layer arranged so that the bonded surfaces of the lower electrode and/or the upper electrode with the first and/or the second lead-out conductor are covered. COPYRIGHT: (C)2009,JPO&INPIT |
