Gepulste PVD-Verfahren und -kammer für die Abscheidung von Chalkogenidschichten,申请号DE200660003927T-传众专利搜索

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发明名称	Gepulste PVD-Verfahren und -kammer für die Abscheidung von Chalkogenidschichten
摘要
申请公布号	DE602006003927(D1)	申请公布日期	2009.01.15
申请号	DE200660003927T	申请日期	2006.03.31
申请人	STMICROELECTRONICS S.R.L., AGRATE BRIANZA	发明人	MARANGON, MARIA SANTINA;BESANA, PAOLA;CECCHINI, RAIMONDO;TRESOLDI, MAURO
分类号	C23C14/04;C23C14/06	主分类号	C23C14/04
代理机构		代理人
主权项
地址

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