| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To inhibit polymer production, to conduct polymer decomposition and to improve conversion efficiency in a method and an apparatus for preparing trichlorosilane. <P>SOLUTION: The method and the apparatus for preparing trichlorosilane comprise: a conversion reaction step (first reaction step) of carrying out conversion reaction of tetrachlorosilane and hydrogen, which are raw materials, within a first temperature range of 1,000-1,900°C to obtain a first reaction produced gas comprising trichlorosilane, dichlorosilylene, hydrogen chloride and a higher silane compound; a first cooling step of cooling the first reaction produced gas to≤950°C within 1 sec (but not cooling to <600°C within 0.01 sec); a second reaction step of keeping the first reaction produced gas within a second temperature range of 600-950°C for 0.01-5 sec; and a second cooling step of cooling a second reaction produced gas obtained after the second reaction step to <600°C. A method for preparing a polycrystal silicon using the trichlorosilane is also provided. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
