| 摘要 |
PROBLEM TO BE SOLVED: To provide a focusing device which effectively uses two kinds of focus detection systems but whose required time is short, and a high-performance microscope device. SOLUTION: The focusing device includes: focus detection means (7 to 14 and 16 to 22) generating a defocus signal showing deviation in an optical axis direction between the focus of an objective lens (3) and an object (2) by two kinds of systems, that is, a first system having a wide detection range and low detection accuracy and a second system having a narrow detection range and high detection accuracy in parallel or in a time-division manner; and adjustment means (23, 24, 25 and 26) monitoring an evaluated value showing the propriety of a second defocus signal generated by the second system, adjusting a distance between the objective lens and the object on the basis of a first defocus signal generated by the first system when the evaluated value is lower than a prescribed level, and adjusting the distance on the basis of the second defocus signal when the evaluated value exceeds the prescribed level. COPYRIGHT: (C)2009,JPO&INPIT |
