| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly sensitive Coriolis flow meter suitable for measuring an ultra-minute quantity of flow. SOLUTION: The Coriolis flow meter 11 having a vibration direction regulation means is configured to include flow tubes 13, 13, a driving means 14 for driving the flow tubes 13, 13, and phase difference detection means 15, 15 for detecting phase differences proportional to Coriolis forces. Moreover, the flow meter is configured to include flat springs 16, 16 which function as vibration direction regulation means, and a flow tube fixing member 17 which also functions as a vibration direction regulation means and serves as a fixing member for the flow tubes 13, 13. COPYRIGHT: (C)2009,JPO&INPIT
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