发明名称 |
FORMING METHOD OF CONDUCTIVE FILM, AND CONDUCTIVE FILM |
摘要 |
PROBLEM TO BE SOLVED: To provide a forming method of a conductive film capable of increasing a film thickness of the conductive film and expanding an allowable error range of its film thickness while maintaining original chemical characteristics and retaining electric resistance in an allowable range. SOLUTION: The forming method of the conductive film has a process (step S2) in which a solution obtained by dispersing a plurality of metal complexes and a plurality of non-metal particulates having higher electric resistance than the metal complexes in solvent is injected toward a undercoat member as liquid droplets and in which the liquid droplets are made to land at the undercoat member, and a process (steps S4, S6) in which the liquid droplets made to land on the undercoat member are dried. COPYRIGHT: (C)2009,JPO&INPIT
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申请公布号 |
JP2009009847(A) |
申请公布日期 |
2009.01.15 |
申请号 |
JP20070170917 |
申请日期 |
2007.06.28 |
申请人 |
CANON INC |
发明人 |
YAMABE SUMISHIGE;KINOSHITA SHIZUO;SAKURAI NAOAKI |
分类号 |
H01B13/00;B05D1/26;B05D5/12;H01B5/14;H01L21/288 |
主分类号 |
H01B13/00 |
代理机构 |
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代理人 |
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地址 |
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