发明名称 FORMING METHOD OF CONDUCTIVE FILM, AND CONDUCTIVE FILM
摘要 PROBLEM TO BE SOLVED: To provide a forming method of a conductive film capable of increasing a film thickness of the conductive film and expanding an allowable error range of its film thickness while maintaining original chemical characteristics and retaining electric resistance in an allowable range. SOLUTION: The forming method of the conductive film has a process (step S2) in which a solution obtained by dispersing a plurality of metal complexes and a plurality of non-metal particulates having higher electric resistance than the metal complexes in solvent is injected toward a undercoat member as liquid droplets and in which the liquid droplets are made to land at the undercoat member, and a process (steps S4, S6) in which the liquid droplets made to land on the undercoat member are dried. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009009847(A) 申请公布日期 2009.01.15
申请号 JP20070170917 申请日期 2007.06.28
申请人 CANON INC 发明人 YAMABE SUMISHIGE;KINOSHITA SHIZUO;SAKURAI NAOAKI
分类号 H01B13/00;B05D1/26;B05D5/12;H01B5/14;H01L21/288 主分类号 H01B13/00
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