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发明名称
Einzelwaferätzgerät
摘要
申请公布号
DE08001912(T1)
申请公布日期
2009.01.15
申请号
DE20080001912T
申请日期
2008.02.01
申请人
SUMCO CORP.
发明人
KATOH, TAKEO;HASHII, TOMOHIRO;MURAYAMA, KATSUHIKO;KOYATA, SAKAE;TAKAISHI, KAZUSHIGE
分类号
H01L21/00
主分类号
H01L21/00
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代理人
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