| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pipe joint for ultrapure water and its piping system capable of preventing the elution of impurities from the pipe joint to ultrapure water, and capable of improving oxygen non-permeability and chemical resistance, in the pipe joint and its piping system capable of handling the ultrapure water. <P>SOLUTION: In the pipe joint for ultrapure water, at least a liquid contact part of the synthetic resin pipe joint is coated with a DLC film. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
