| 摘要 |
PROBLEM TO BE SOLVED: To improve the work efficiency of a gas storage, measurement and distribution system which utilizes a monolithic carbon adsorbent as a gas storage medium. SOLUTION: A fluid storage, measurement and distribution apparatus including a fluid storage, measurement and distribution vessel having an interior volume which contains a physical adsorbent sorptively retaining fluid thereon and from which the fluid is desorbable for measurement and distribution from the vessel, and a measurement and distribution assembly coupled to the vessel for measuring and distributing the desorbed fluid from the vessel. The physical adsorbent includes the monolithic carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) fill density measured for arsine gas at 25°C and a pressure of 650 torr that is greater than 400 grams arsine per liter of an adsorbent; (b) at least 30% of the overall porosity of the adsorbent including slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity including micropores of diameters smaller than 2 nanometers; and (c) having been formed by pyrolysis and optional activation, at a temperature below 1,000°C, and having a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter. COPYRIGHT: (C)2009,JPO&INPIT |
