| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of keeping a vaporizing chamber for metal vaporization installed in a heating furnace over a long time without generating a crack. SOLUTION: The vaporizing chamber 2 for metal vaporization installed in the heating furnace 1 is formed of ceramics. A process of respectively isolating the vaporization chamber from a supply pipe 8 for supplying a purge gas to the vaporizing chamber 2 and a delivery pipe 4 while the heating furnace 1 is operated and stopped after finishing a process of vaporizing metal in the vaporizing chamber by heating, and delivering the produced vaporized gas of the metal to a vaporized gas consumption device 3 through a delivery pipe 4 connecting the vaporizing chamber 2 to the vaporized gas consumption device 3, and a decompression and purge gas supply process of vacuum-decompressing the vaporizing chamber 2 through an exhaust pipe 6 connecting the vaporizing chamber 2 to a decompression device 5, and thereafter supplying the purge gas to the vaporizing chamber 2 through the supply pipe 8 are repeatedly continuously executed multiple number of times in that order. COPYRIGHT: (C)2009,JPO&INPIT
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