| 摘要 |
PROBLEM TO BE SOLVED: To provide a centrifugal separation type foreign matter removal apparatus which is capable of conducting the miniaturization. SOLUTION: The foreign matter removal apparatus (10) stores a purification tank (40) in a casing (15). In the inner atmosphere of the casing (15), the part between the casing (15) and the purification tank (40) serves as a liquid passageway (21). At the outer peripheral surface of the purification tank (40) a plurality of vanes (60) are radially protruded. The pressure at the upstream side of the vane (60) is lower than at the downstream side of the vane (60) at the liquid passageway (21) when the purification tank (40) is rotatively driven by an electric motor (30). Resultingly, a cutting liquid containing the foreign matter is sucked into the inner atmosphere of the purification tank (40) through an introduction tube (26). COPYRIGHT: (C)2009,JPO&INPIT
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