发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device includes a semiconductor substrate, and a p-channel MOS transistor provided on the semiconductor substrate, the p-channel MOS transistor comprising a first gate dielectric film including Hf, a second gate dielectric film provided on the first gate dielectric film and including aluminum oxide, and a first metal silicide gate electrode provided on the second gate dielectric film.
申请公布号 US2009014809(A1) 申请公布日期 2009.01.15
申请号 US20070882012 申请日期 2007.07.30
申请人 SEKINE KATSUYUKI;AOYAMA TOMONORI;KOBAYASHI TAKUYA 发明人 SEKINE KATSUYUKI;AOYAMA TOMONORI;KOBAYASHI TAKUYA
分类号 H01L21/28;H01L27/092;H01L29/423 主分类号 H01L21/28
代理机构 代理人
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