| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample transfer method for a transmission electron microscope with operability improved by transferring a sample smoothly to a next mesh position when it approaches a grid part. SOLUTION: In transferring a sample held in the sample holder in the transmission electron microscope, its transmission image is obtained with the sample held by the sample holder, a statistical treatment is performed on the obtained sample and the transmission image of a grid of the sample holder, and a velocity of the sample transfer is controlled based on the statistical treatment. COPYRIGHT: (C)2009,JPO&INPIT
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