| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS (Micro Electro Mechanical System) element, and a method for manufacturing the same, in which the characteristic value is changeable for the MEMS element in a single design, in such a way that the characteristic value after the change is maintained. SOLUTION: A drive electrode 16 is provided to drive a movable part 13 as a movable electrode as well as a floating gate 2. In the state where electric charges are injected to the floating gate 2 to generate electrostatic force to the movable part 13, therefore, the movable part 13 is moved. The MEMS element 10 has a characteristic value, therefore, in accordance with its movable state in a state where force is added. Since the quantity of electric charges injected to the floating gate 2 is adjustable, the force added to the movable part 13 is also changeable in accordance with the quantity of the injected electric charges, and the characteristic value of the MEMS element 10 is also changeable. Unless the quantity of electric charges injected to the floating gate 2 is changed, the characteristic value of the MEMS element 10 is kept unchanged. COPYRIGHT: (C)2009,JPO&INPIT
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