发明名称 |
METHOD FOR DEPOSITION OF AN ANTI-SCRATCH COATING |
摘要 |
Process for the vacuum deposition of at least one boron-based thin film on a substrate, characterized in that: at least one sputtering species that is chemically inactive or active with respect to boron is chosen; a collimated beam of ions comprising predominantly said sputtering species is generated using at least one linear ion source positioned within an installation of industrial size; said beam is directed onto at least one boron-based target; and at least one surface portion of said substrate facing said target is positioned in such a way that said material sputtered by the ion bombardment of the target or a material resulting from the reaction of said sputtered material with at least one of the sputtering species is deposited on said surface portion.
|
申请公布号 |
US2009017314(A1) |
申请公布日期 |
2009.01.15 |
申请号 |
US20060997323 |
申请日期 |
2006.07.26 |
申请人 |
SAINT-GOBAIN GLASS FRANCE |
发明人 |
NADAUD NICOLAS;KHARCHENKO ANDRIY |
分类号 |
C23C14/34;B32B9/04;B32B15/04 |
主分类号 |
C23C14/34 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|