发明名称 METHOD FOR DEPOSITION OF AN ANTI-SCRATCH COATING
摘要 Process for the vacuum deposition of at least one boron-based thin film on a substrate, characterized in that: at least one sputtering species that is chemically inactive or active with respect to boron is chosen; a collimated beam of ions comprising predominantly said sputtering species is generated using at least one linear ion source positioned within an installation of industrial size; said beam is directed onto at least one boron-based target; and at least one surface portion of said substrate facing said target is positioned in such a way that said material sputtered by the ion bombardment of the target or a material resulting from the reaction of said sputtered material with at least one of the sputtering species is deposited on said surface portion.
申请公布号 US2009017314(A1) 申请公布日期 2009.01.15
申请号 US20060997323 申请日期 2006.07.26
申请人 SAINT-GOBAIN GLASS FRANCE 发明人 NADAUD NICOLAS;KHARCHENKO ANDRIY
分类号 C23C14/34;B32B9/04;B32B15/04 主分类号 C23C14/34
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