METHOD OF CORRECTING DEFECTS OF GRAYTONE MASK, METHOD OF MANUFACTURING GRAYTONE MASK AND GRAYTONE MASK, AND PATTERN TRANSFER METHOD

摘要

A method of correcting defects of gray tone mask is provided to obtain gray-tone effect nearly like the penetration rate range allowed to the normal gray-tone part at the half light-transmitting part. A gray cone mask(20) comprises the half light-transmitting part(23) reducing the transmission amount of the light shielding portion(21), a light-transmitting part(22). The half transmissive film(26) reducing the transmission amount of the exposure light on the transparent substrate includes the half light-transmitting part. The defect region is specified in the half light-transmitting part. The crystal film(27) of the other composition and half transmissive film is formed in the defect region. The light transmission of the crystal film to the exposure light of the fixed wavelength is identical to that of the half transmissive film based on the light transmission property of the detected crystal film. At that time, the difference of crystal film and half transmissive film is within 1% when the light transmission of the light-transmitting part is 100%.