发明名称 METHOD FOR FORMING CARBON NANOTUBE FILM, FILM-FORMING APPARATUS, AND CARBON NANOTUBE FILM
摘要 <p>Disclosed are a method and an apparatus for efficiently mass-producing a single-walled carbon nanotube film, which is useful as a industrial material, at low temperature and low cost. The method and apparatus are characterized in that a carbon nanotube is synthesized from a raw material source by a fluidized CVD process, and the thus-synthesized carbon nanotube is caused to directly adhere to a substrate in a chamber connected with the reaction tube, thereby forming a carbon nanotube film on the substrate.</p>
申请公布号 WO2009008291(A1) 申请公布日期 2009.01.15
申请号 WO2008JP61917 申请日期 2008.07.01
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;SAITO, TAKESHI 发明人 SAITO, TAKESHI
分类号 C01B31/02 主分类号 C01B31/02
代理机构 代理人
主权项
地址