摘要 |
<p>Disclosed are a method and an apparatus for efficiently mass-producing a single-walled carbon nanotube film, which is useful as a industrial material, at low temperature and low cost. The method and apparatus are characterized in that a carbon nanotube is synthesized from a raw material source by a fluidized CVD process, and the thus-synthesized carbon nanotube is caused to directly adhere to a substrate in a chamber connected with the reaction tube, thereby forming a carbon nanotube film on the substrate.</p> |