| 摘要 |
PROBLEM TO BE SOLVED: To discriminate an abnormality of a chip, even when a supply current of a normal chip is heavy. SOLUTION: This device is equipped with a sample stand 4 for loading an LSI chip 1 thereon; a test pattern generator 3 for supplying a test pattern to the LSI chip 1 through the sample stand 4; an optical system 5 with a laser modulation function for irradiating the LSI chip 1, while scanning with a modulated laser beam 8; an IR-OBIRCH control part 6 for taking out a signal from the LSI chip 1 through a lock-in amplifier for taking out only a signal having a prescribed frequency by a signal from the LSI chip 1, and performing image processing for allowing the taken-out signal to correspond to a scanning point; and a display part 7 for displaying an image based on an image signal from the IR-OBIRCH control part 6. The IR-OBIRCH control part 6 confirms existence of an abnormal current path in the LSI chip 1 based on the image signal. COPYRIGHT: (C)2009,JPO&INPIT
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