发明名称 DEVICE FOR MEASURING CAPACITANCE OF CAPACITOR
摘要 PROBLEM TO BE SOLVED: To efficiently measure the capacitance of a capacitor in an LSI (Large Scale Integration) from the outside of the LSI. SOLUTION: The circuit for measuring the capacitance of a capacitor includes: a comparator circuit for outputting a comparison result by comparing a reference voltage with a voltage of a connection point to which a capacitor to be measured for capacitance is connected; and a current mirror circuit for mirroring a capacitor charging current supplied to the capacitor, wherein, the reference voltage and the capacitor charging current are input from an external LSI tester through an external input-output terminal that the LSI has, and the comparison result and the capacitor charging current are output to the external LSI tester through the external input-output terminal. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009008501(A) 申请公布日期 2009.01.15
申请号 JP20070169371 申请日期 2007.06.27
申请人 NEC ELECTRONICS CORP 发明人 SUZUKI HIROSHI
分类号 G01R31/28;G01R27/26;H01L21/822;H01L27/04 主分类号 G01R31/28
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