发明名称 |
TEST STRUCTURES FOR ELECTRICALLY DETECTING BACK END OF THE LINE FAILURES AND METHODS OF MAKING AND USING THE SAME |
摘要 |
Test structures for electrically detecting BEOL failures are provided. In an embodiment, the structure comprises: an input/output connection disposed above a primary conductive pad which is embedded in an insulator; a dielectric layer disposed upon the insulator; a primary via extending through the dielectric layer down to the primary conductive pad for providing electrical connection between the input/output connection and the primary conductive pad; and a secondary via filled with a conductive material in electrical connection with the input/output connection, the secondary via extending through the dielectric layer down to a secondary interconnect in electrical connection with a secondary conductive pad that is insulated from the primary conductive pad.
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申请公布号 |
US2009015285(A1) |
申请公布日期 |
2009.01.15 |
申请号 |
US20070776114 |
申请日期 |
2007.07.11 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FAROOQ MUKTA G.;LIU XIAO H.;MELVILLE IAN D. |
分类号 |
G01R31/26;H01L21/4763;H01L23/58 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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