发明名称 SYSTEMS AND METHODS FOR VERTICALLY INTEGRATING SEMICONDUCTOR DEVICES
摘要 Systems and methods for vertically integrating semiconductor devices are described. In one embodiment, a method comprises providing an interposer, aligning and bonding a plurality of die to a first surface of the interposer, aligning and bonding a backplate to the plurality of die, and reducing at least one portion of the interposer to create a reconstituted wafer. In another embodiment, an apparatus comprises an interposer operable to receive at least one donor semiconductor device disposed on a first surface of the interposer and aligned therewith, and at least one host semiconductor device disposed on a second surface of the interposer and aligned therewith; where the interposer allows the at least one donor and host semiconductor devices to become vertically integrated.
申请公布号 US2009017580(A1) 申请公布日期 2009.01.15
申请号 US20070776069 申请日期 2007.07.11
申请人 SEMATECH, INC. 发明人 SMITH LARRY
分类号 H01L21/71;H01L23/02 主分类号 H01L21/71
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