METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIUM

摘要

Provided is a method for manufacturing a magnetic recording medium by mounting film forming substrates on a carrier, sequentially transferring the substrates into a plurality of connected chambers, and forming at least a magnetic film and a carbon protection film on each of the film forming substrates in the chamber. After a step of removing the film-formed magnetic recording medium from the carrier, a step of forming a metal film on the carrier surface is performed prior to a step of mounting the film forming substrate on the carrier.