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发明名称
PROCESS FOR COLLECTIVE MANUFACTURING OF MEMBRANES AND SMALL VOLUME CAVITIES HAVING HIGH DIMENSIONAL ACCURACY
摘要
申请公布号
EP2013137(A1)
申请公布日期
2009.01.14
申请号
EP20070728561
申请日期
2007.04.26
申请人
TRONIC'S MICROSYSTEMS
发明人
COLLET, JOEL;NICOLAS, STEPHANE;PISELLA, CHRISTIAN
分类号
B81C1/00;F04B43/04
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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