| 发明名称 |
Titania-doped quartz glass for nanoimprint molds |
| 摘要 |
In the nanoimprint lithography, titania-doped quartz glass having an internal transmittance distribution of up to 10% at wavelength 365 nm is suited for use as nanoimprint molds. |
| 申请公布号 |
EP2014624(A2) |
申请公布日期 |
2009.01.14 |
| 申请号 |
EP20080251958 |
申请日期 |
2008.06.05 |
| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
MAIDA, SHIGERU;OTSUKA, HISATOSHI |
| 分类号 |
B82Y10/00;B82Y40/00;C03B19/14;C03C3/06;G03F7/00 |
主分类号 |
B82Y10/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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