| 发明名称 |
Ferroelectric capacitor, ferroelectric memory, piezoelectric element, liquid jet head, and printer |
| 摘要 |
<p>To provide ferroelectric capacitors with few crystal defects and having excellent characteristics, a ferroelectric capacitor is proposed that includes an electrode (102) and a PZT system ferroelectric film (101) formed on the electrode. In the ferroelectric film (101), Nb replaces Ti composition by 2.5 mol % or more but 40 mol % or less, and the electrode (102) does not include almost any oxygen that diffuses from the ferroelectric film.</p> |
| 申请公布号 |
EP1589566(B1) |
申请公布日期 |
2009.01.14 |
| 申请号 |
EP20050008138 |
申请日期 |
2005.04.14 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
KIJIMA, TAKESHI;HAMADA, YASUAKI |
| 分类号 |
B41J2/045;H01L21/02;B41J2/055;B41J2/135;B41J2/14;B41J2/145;C01G25/00;C01G33/00;C04B35/49;C04B35/491;H01L21/8246;H01L27/105;H01L27/115;H01L41/09;H01L41/187;H01L41/29;H01L41/39 |
主分类号 |
B41J2/045 |
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