| 摘要 |
The present invention relates to a substrate cassette that houses a plurality of horizontally oriented substrates in multiple levels in the vertical direction and in which support bars are arranged that support the substrates so as to inhibit bending of the central portion of each substrate, wherein a vertical direction adjustment mechanism that adjusts distortion of the support bars in the vertical direction is provided between the support bars and a frame formed on the back of the opposite side from the substrate insertion side.
|
