| 摘要 |
<p>A stage apparatus is provided with a movable body having a holding section for holding a substrate; a first mechanism; and a controller. The movable body moves between a first position and a second position. At the first position, the substrate is held by the holding section, and at the second position, the substrate is separated from the holding section. The first mechanism adjusts an interval between the substrate and the holding section. The controller moves the movable body between the first position and the second position, and at the same time, performs at least partial adjustment of the interval by the first mechanism.</p> |
