| 摘要 |
A carrier board circulating method of a test handler and a chamber system of the test handler are provided to prevent semiconductor devices of previous and next lots with each other in the case of continuous test of the lots. A carrier board circulating method of a test handler includes step A of conveying carrier boards, for which the loading of semiconductor devices is finished, to a test chamber(S540), step B of withdrawing the carrier boards from the test chamber if the test for the stacked semiconductor devices is finished(S550), step C of conveying the withdrawn carrier boards to an unloading position(S560-S580), and step D of conveying the carrier boards to a loading position if the unloading of the semiconductor devices is finished(S590). |
