MICROREACTOR

摘要

Microreactor (1) comprising vacuum housing (2); microreactor main body (4) disposed in vacuum closed cavity (3) of the vacuum housing (2); and getter heating substratum (6) provided on at least one surface of the microreactor main body (4). The microreactor main body (4) has raw material introduction port (19a) connected to the outside of the vacuum housing (2) by means of raw material supply pipe (5A) and gas emission port (19b) connected to the outside of the vacuum housing (2) by means of gas emission pipe (5B). The getter heating substratum (6) includes substratum (7), heating element (9) provided on the substratum (7) in noncontact relationship and getter material layer (10).