发明名称 METHOD OF DETECTING AN ENDPOINT AND VIEW PORT FOR DETECTING AN ENDPOINT USING THE SAME
摘要 The method for detecting an end point and the viewport for detecting the end point using the same are provided to prevent the loss of the light by using the viewport for reflecting and focusing the light and delivering the refracted light. The viewport(100) for detecting the end point comprises the light-collecting portion(110), the conveying portion(120), and the reflector(130). The light-collecting portion accepts the light and is made of the transparent material. The light-collecting portion comprises the convex surface for receiving the light and the flat surface in order to increase the amount of the light in the conveying portion. The conveying portion is connected to the light-collecting portion and delivers the light received from the light-collecting portion. The conveying portion is made of the transparent material. The reflector surround the side wall of the conveying portion and reflects delivered the lights transferred from the conveying portion.
申请公布号 KR20090005719(A) 申请公布日期 2009.01.14
申请号 KR20070068982 申请日期 2007.07.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 BAEK, JWNG HWAN
分类号 H01L21/205;H01L21/02 主分类号 H01L21/205
代理机构 代理人
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