| 摘要 |
<p>A rotatable contamination barrier (1) for use with an EUV radiation system is disclosed. The contamination barrier (1) has a blade structure (2) configured to trap contaminant material coming from a radiation source (6), a bearing structure, coupled to a static frame, configured to rotatably bear the blade structure (2), and an eccentric mass element (12) displaced relative to a central axis of rotation (13) to balance the blade structure (12) in the bearing structure.</p> |
