| 摘要 |
An exposure apparatus for performing exposure of an object to light. A measuring device measures a wavelength spectrum of the light. A processor calculates a center wavelength of light based on the measured wavelength spectrum, and a main controller determines whether the exposure is to be performed, based on the calculated center wavelength of the light. The wavelength spectrum includes a first spectral component and a second spectral component, and the processor calculates the center wavelength of the light lambda0 in accordance with: <?in-line-formulae description="In-line Formulae" end="lead"?>lambda0=lambda0-1+Deltalambdax(Deltalambda-A/(Deltalambda-A+Deltalambda-B)), and<?in-line-formulae description="In-line Formulae" end="tail"?> <?in-line-formulae description="In-line Formulae" end="lead"?>Deltalambda_A:Deltalambda_B=Energy-2:Energy-1,<?in-line-formulae description="In-line Formulae" end="tail"?> where lambda0-1 is a center wavelength of the first spectral component, lambda0-2 (lambda0-2>lambda0-1) is a center wavelength of the second spectral component, Energy-1 is a peak light intensity of the first spectral component, Energy-2 is a peak light intensity of the second spectral component, and Deltalambda=lambda0-2-lambda0-1.
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