发明名称 Thin film transistor and method of fabricating the same
摘要 A thin film transistor (TFT) and a method of fabricating the same, in which a fabrication process is simplified and damage to a gate insulating layer is decreased. The method of fabricating the TFT includes forming at least one buffer layer on a substrate, forming a first semiconductor layer formed on the buffer layer and a second semiconductor layer by depositing a semiconductor doped with a dopant on the first semiconductor layer, patterning the second semiconductor layer to form source and drain regions, forming a gate insulating layer on the source and drain regions, and forming a gate electrode on the gate insulating layer.
申请公布号 US7476896(B2) 申请公布日期 2009.01.13
申请号 US20060361727 申请日期 2006.02.23
申请人 SAMSUNG SDI CO., LTD. 发明人 CHOI DAE CHUL;CHOI BYOUNG DEOG;IM CHOONG YOUL
分类号 H01L29/04;H01L29/10;H01L29/15;H01L29/47;H01L29/76;H01L29/812;H01L31/036;H01L31/0376;H01L31/07;H01L31/108;H01L31/112;H01L31/20 主分类号 H01L29/04
代理机构 代理人
主权项
地址